中国机械工程学会第二十四届全国学术研讨会论文集 中华民国九十六年十一月二十三日,二十四日
中原大学 桃园,中坜 论文编号:D12-0029
System Design and Measurement of a 6-DOF Precision-Positioning Table
Wang-Chi Lin and Chun-Ting Fa and Rong-Fong Fung Department of Mechanical and Automation Engineering, National Kaohsiung First University of Science and Technology NSC Project No.: NSC 94-2622-E-327-001-CC3
Abstract
The purpose of this study is to design and measure a 6-DOF precision-positioning table. The focus of this paper is to design a 6-DOF precision-positioning table which is assembled by two different kinds of 3-DOF precision-positioning tables: a series of plane 3-DOF (X, Y, θz) precision-positioning Table and a cylinder-type 3-DOF (θx, θy, Z) precision-positioning table. The most transform matrix will be obtained in the measurement comparison between the average and single transform matrixes. Combining the transform matrices into one of a 6-DOF. In order to calculate the best transform matrix, the measurements of the 6-DOF table are compared with those measured from the combination of 2 precision-positioning tables. The conclusion can be drawn that in approach the object value, the averaged transform matrix has better performance than that of the single transform matrix and the experiments show the associative transform matrixes have better performance than the monolithic transform matrix. design of the micropositioner utilizes the monolithic flexural mechanism with the built-in multilayer piezoelectric actuators to achieve the translations in the X- and Y-axes and rotation in the θZ-axis. Hua [5] have presented input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage. The monolithic compliant mechanism is composed of typical notch flexure hinges and three PZT actuators. The actuators are placed 120° apart from each other. This symmetric design provides a large yaw motion. In a 3-DOF (θx,θy ,Z) precision-positioning table, Zhang [6] have presented investigation of a 3-DOF micro-positioning table for surface grinding. The table consists of a moving platform, coupled to a base, three piezoelectric actuators and three capacitive sensors. In a 6-DOF precision-positioning table, Kim [7] have presented design and control of a 6-DOF high-precision integrated positioner. This high-precision positioning system consists of a novel concentrated-field magnet matrix and a triangular single-moving platen that carries three 3-phase permanent-magnet linear levitation motor armatures. Ting [8] have presented error compensation and feedforward controller design for a 6-DOF micro-positioning platform, moreover, the micro-positioning platform driven by stack type piezoelectric actuators The purpose of this study is to design and measure a 6-DOF precision-positioning device. Design of positioning device emphasizes the mechanism design and configuration combination of a 6 DOF precision-positioning table. Mechanism actuated by piezoelectric actuators will be designed according to theory of flexible deformation. When piezoelectric actuators are driven by applied voltages, they will lengthen or shorten, and the table is driven to a precision displacement of translational and rotational. The proposed 6-DOF precision-positioning table is combined from two independent 3-DOF precision-positioning tables, which include a series-type 3-DOF (X,Y,θz) precision-positioning table, and a cylinder-type 3-DOF (θx , θy , Z) precision-positioning Table.

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